This treatise explores the science and technology of lithographic processes and summarizes the most recent innovations in semiconductor manufacturing. Reviewing the interaction of light, electron beams, and X-rays with resist materials, the book covers the theoretical basis of semiconductor fabrication, the principles of optical image transfer, the chemical amplification of resist materials to improve sensitivity, resolution enhancement and the limits of resolution in resist materials, contrast enhancement materials, multilayer resist, and dry development processes. A rigorous solution of two-dimensional light wave diffraction is introduced, and practical aspects of typical lithographic processes are addressed.
This guide, intended mainly for students, describes the methods professional problem-solvers use, explains why these methods have evolved, and shows how to use them. Rather than covering the conceptual aspects of problem-solving, this book emphasizes simple actions that can be used to analyze and solve already-defined problems, even those that the solvers do not think they know how to solve. It also describes the statement, organization, and presentation of scientific and technical material.
In an effort to provide a single source of information on the principles and techniques of discrete-event simulation and its applications in major industries, this handbook brings together contributions by academics, practitioners, and software developers. Among the topics covered are simulation methodology, including experimental design and data analysis; recent advances, such as object-oriented simulation, on-line simulation, and parallel and distributed simulation; applications across a range of manufacturing and service industries; guidelines for successful simulations and simulation project management; and simulation software and simulation industry vendors.
The dynamics of mechanical and structural systems that consist of interconnected rigid and deformable components are highly nonlinear, presenting complex problems that in most cases can be solved only with computer-based techniques. This volume provides an introduction to the subject of multibody dynamics, with an emphasis on flexible body dynamics. The first chapter covers the basic ideas of kinematics and dynamics of rigid and deformable bodies. The book then moves on to advanced topics, including finite- element formulations, and concludes with an explanation of newer computational techniques.
Intended to provide an introduction to the methods and theory of partial differential equations without assuming a background in functional analysis and differential geometry, this volume covers the heat, wave, and Poisson equations as well as Maxwell's equations, the Navier-Stokes equations, Navier's equations (for linear elasticity), existence and uniqueness results, Dirichlet forms, weak solutions, and the Ritz-Galerkin methods for the heat equation. Appendices deal with vector analysis, continuum mechanics, and the Maple computer algebra system. A multiplatform CD-ROM (designed for Windows 3.1 or 95, Macintosh 680x0 or Power PC, and most Unix machines) contains worked examples from the book as Maple worksheets, as well as a Maple demo.
Topics covered include properties of cryogenic fluids, properties of cryogenic materials, heat transfer in cryogenics, cryostat design, cryostat instrumentation, refrigerants for normal refrigeration, small cryocoolers, superconducting magnet technology, cryogenic equipment, superfluid helium (He II), and cryogenic safety. Numerous tables, graphs, and equations are included.
Using interviews with astronauts and cosmonauts and their writings, the author shows how experiences such as circling the Earth every 90 minutes and viewing it from the moon have profoundly affected space travelers' perceptions of themselves, their world, and the future. The author further maintains that the rest of us have been similarly affected, and advocates continued space exploration and settlement in order to bring a new perspective to life on Earth.
This textbook on the use of digital computers in the real-time control of dynamic systems emphasizes the design of digital controls that achieve good dynamic response and small errors while using signals that are sampled in time and quantized in amplitude. Both transform-based and state-based classical and modern control methods are described and applied to illustrative examples. Two new chapters in this edition provide a review of feedback control systems and an overview of digital control. Matlab is used throughout, and this edition has been updated to be compatible with Matlab versions 4 and 5.
The incompressible Navier-Stokes equations, which provide a mathematical model for turbulent flows at relatively low speeds, appear to be unsolvable except through numerical simulation, which provides useful approximations but little direct understanding. The authors report on hopeful new developments—the discovery by experimentalists of coherent structures in certain turbulent flows, the suggestion that strange attractors and other ideas from finite-dimensional dynamical systems theory might play a role in the analysis of the governing equations, and the introduction of the Karhunen-Love or proper orthogonal decomposition—which they use to create low-dimensional models of turbulence, resolving only the coherent structures.
Aimed at applied mathematicians and mechanical engineers, this book deals with constitutive equations for thermoviscoelastic media at finite and small strains, mathematical models for describing the manufacturing of polymeric articles and polymeric composites, and optimal design and fabrication processes for structural members. The author employs a concept of adaptive links, which allows the viscoelastic response in polymeric media to be modeled as the behavior of a transient network of elastic springs (links) that arise and break due to micro-Brownian motion, and he successively uses three basic configurations (reference, natural, and actual) for accretion processes in viscoelastic media.
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